Abstract
Atmospheric pressure plasma jets (APPJs) are increasingly used in plasma medicine and materials processing applications. Reproducible and effective operation of APPJs requires regulating the cumulative effects of plasma on a target substrate in the face of variabilities and exogenous disturbances. This article investigates spatial delivery of thermal effects - thermal dose - of plasma using a kHz-excited APPJ in helium translated over a dielectric substrate. A dose metric is presented for quantifying the cumulative, nonlinear thermal effects of plasma along the translation trajectory of the APPJ. An optimization-based feedback control strategy is proposed for real-time regulation of thermal dose delivery using spatial measurements of substrate temperature. Experimental investigation reveals that feedback control is crucial for achieving spatially uniform dose delivery.
Original language | English (US) |
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Article number | 025006 |
Journal | Plasma Sources Science and Technology |
Volume | 28 |
Issue number | 2 |
DOIs | |
State | Published - Feb 25 2019 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
Keywords
- atmospheric pressure plasma jets
- dose delivery
- feedback control