Space-time resolved kinetics of mixed rare-gas-attaching gas plasmas

Richard A. Gottscho, Geoffrey R. Scheller, Thomas Intrator, David B. Graves

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


Because plasma processing recipes are usually determined empirically, it is desirable to develop methods for isolating kinetic mechanisms in discharges through gas mixtures. In this manuscript, we show how space-time resolved measurements of plasma-induced emission and laser-induced fluorescence intensities are used to distinguish between electronic, ionic, and neutral mechanisms for excited-state production in radio frequency discharges containing Ar and BC13. Although it was expected that the Ar metastable state would affect the degree of BC13dissociation, the mechanism uncovered using in situ diagnostics had not been considered previously: a two-step process involving Ar metastables and slow electrons leads to enhanced dissociation of BC13. By contrast, direct dissociative energy transfer from Ar metastables to BC13is unimportant. This mechanism leads to a narrow concentration range over which the dissociative excitation of BC13is increased tenfold relative to the pure BC13discharge.

Original languageEnglish (US)
Pages (from-to)1393-1396
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number3
StatePublished - May 1988
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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