Space applications of microelectromechanical systems: Southwest research institute® vacuum microprobe facility and initial vacuum test results

D. J. McComas; G. P. Miller; J. N. Mitchell; S. E. Pope; P. W. Valek

doi:10.1063/1.1593789

Space applications of microelectromechanical systems: Southwest research institute® vacuum microprobe facility and initial vacuum test results

D. J. McComas
, G. P. Miller
, J. N. Mitchell
, S. E. Pope
, P. W. Valek

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

The first fully vacuum microprobe test facility specifically intented to optimize the development of microelectromechanical systems (MEMS) devices for space applications was designed. This facility included an ion-pumped, ultraclean vacuum system outfitted with four three-axis precision microprobe stages. The results of many cycle test of a comb-driven, force-distance multiplied sliding aperture door were shown.

Original language	English (US)
Pages (from-to)	3874-3878
Number of pages	5
Journal	Review of Scientific Instruments
Volume	74
Issue number	8
DOIs	https://doi.org/10.1063/1.1593789
State	Published - Aug 2003
Externally published	Yes

All Science Journal Classification (ASJC) codes

Instrumentation

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10.1063/1.1593789

Cite this

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abstract = "The first fully vacuum microprobe test facility specifically intented to optimize the development of microelectromechanical systems (MEMS) devices for space applications was designed. This facility included an ion-pumped, ultraclean vacuum system outfitted with four three-axis precision microprobe stages. The results of many cycle test of a comb-driven, force-distance multiplied sliding aperture door were shown.",

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AU - Pope, S. E.

AU - Valek, P. W.

PY - 2003/8

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Space applications of microelectromechanical systems: Southwest research institute® vacuum microprobe facility and initial vacuum test results

Abstract

All Science Journal Classification (ASJC) codes

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