Space applications of microelectromechanical systems: Southwest research institute® vacuum microprobe facility and initial vacuum test results

D. J. McComas, G. P. Miller, J. N. Mitchell, S. E. Pope, P. W. Valek

Research output: Contribution to journalArticle

5 Scopus citations

Abstract

The first fully vacuum microprobe test facility specifically intented to optimize the development of microelectromechanical systems (MEMS) devices for space applications was designed. This facility included an ion-pumped, ultraclean vacuum system outfitted with four three-axis precision microprobe stages. The results of many cycle test of a comb-driven, force-distance multiplied sliding aperture door were shown.

Original languageEnglish (US)
Pages (from-to)3874-3878
Number of pages5
JournalReview of Scientific Instruments
Volume74
Issue number8
DOIs
StatePublished - Aug 1 2003
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Instrumentation

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