The first fully vacuum microprobe test facility specifically intented to optimize the development of microelectromechanical systems (MEMS) devices for space applications was designed. This facility included an ion-pumped, ultraclean vacuum system outfitted with four three-axis precision microprobe stages. The results of many cycle test of a comb-driven, force-distance multiplied sliding aperture door were shown.
|Original language||English (US)|
|Number of pages||5|
|Journal||Review of Scientific Instruments|
|State||Published - Aug 2003|
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