Space applications of microelectromechanical systems: Southwest research institute® vacuum microprobe facility and initial vacuum test results

D. J. McComas; G. P. Miller; J. N. Mitchell; S. E. Pope; P. W. Valek

doi:10.1063/1.1593789

Space applications of microelectromechanical systems: Southwest research institute® vacuum microprobe facility and initial vacuum test results

D. J. McComas, G. P. Miller, J. N. Mitchell, S. E. Pope, P. W. Valek

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

The first fully vacuum microprobe test facility specifically intented to optimize the development of microelectromechanical systems (MEMS) devices for space applications was designed. This facility included an ion-pumped, ultraclean vacuum system outfitted with four three-axis precision microprobe stages. The results of many cycle test of a comb-driven, force-distance multiplied sliding aperture door were shown.

Original language	English (US)
Pages (from-to)	3874-3878
Number of pages	5
Journal	Review of Scientific Instruments
Volume	74
Issue number	8
DOIs	https://doi.org/10.1063/1.1593789
State	Published - Aug 2003
Externally published	Yes

All Science Journal Classification (ASJC) codes

Instrumentation

Access to Document

10.1063/1.1593789

Cite this

@article{fff53c5b19a54eea9732f0ddfa4f26f3,

title = "Space applications of microelectromechanical systems: Southwest research institute{\textregistered} vacuum microprobe facility and initial vacuum test results",

abstract = "The first fully vacuum microprobe test facility specifically intented to optimize the development of microelectromechanical systems (MEMS) devices for space applications was designed. This facility included an ion-pumped, ultraclean vacuum system outfitted with four three-axis precision microprobe stages. The results of many cycle test of a comb-driven, force-distance multiplied sliding aperture door were shown.",

author = "McComas, {D. J.} and Miller, {G. P.} and Mitchell, {J. N.} and Pope, {S. E.} and Valek, {P. W.}",

year = "2003",

month = aug,

doi = "10.1063/1.1593789",

language = "English (US)",

volume = "74",

pages = "3874--3878",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics Publising LLC",

number = "8",

}

TY - JOUR

T1 - Space applications of microelectromechanical systems

T2 - Southwest research institute® vacuum microprobe facility and initial vacuum test results

AU - McComas, D. J.

AU - Miller, G. P.

AU - Mitchell, J. N.

AU - Pope, S. E.

AU - Valek, P. W.

PY - 2003/8

Y1 - 2003/8

N2 - The first fully vacuum microprobe test facility specifically intented to optimize the development of microelectromechanical systems (MEMS) devices for space applications was designed. This facility included an ion-pumped, ultraclean vacuum system outfitted with four three-axis precision microprobe stages. The results of many cycle test of a comb-driven, force-distance multiplied sliding aperture door were shown.

AB - The first fully vacuum microprobe test facility specifically intented to optimize the development of microelectromechanical systems (MEMS) devices for space applications was designed. This facility included an ion-pumped, ultraclean vacuum system outfitted with four three-axis precision microprobe stages. The results of many cycle test of a comb-driven, force-distance multiplied sliding aperture door were shown.

UR - http://www.scopus.com/inward/record.url?scp=0042377440&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0042377440&partnerID=8YFLogxK

U2 - 10.1063/1.1593789

DO - 10.1063/1.1593789

M3 - Article

AN - SCOPUS:0042377440

SN - 0034-6748

VL - 74

SP - 3874

EP - 3878

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 8

ER -

Space applications of microelectromechanical systems: Southwest research institute® vacuum microprobe facility and initial vacuum test results

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this