SiN_x barrier layers deposited at 250°C on a clear polymer substrate

Keyphrases

• SiNx Film 100%
• Technology Battles 50%
• Mechanical Fracture 50%
• Low RF Power 50%
• High Threshold Voltage 50%
• Radio Frequency Plasma Enhanced Chemical Vapor Deposition 50%
• Mechanical Peeling 50%
• Increasing Process 50%
• Substrate Preparation 50%
• Device Instability 50%

Material Science

• Mechanical Fracture 40%

Engineering

• Mechanical Fracture 40%