Single sub-20 nm wide, centimeter-long nanofluidic channel fabricated by novel nanoimprint mold fabrication and direct imprinting

Xiaogan Liang, Keith J. Morton, Robert H. Austin, Stephen Y. Chou

Research output: Contribution to journalArticle

107 Scopus citations

Abstract

We report and demonstrate a new method to fabricate single fluidic-channeis of uniform channel width (11-50 nm) and over 1.5 cm in length, which are essential to developing innovative bio/chemical sensors but have not been fabricated previously. The method uses unconventional nanofabrication (a combination of crystallography anisotropic etching, conformal coating, and edge patterning, etc.) to create an imprint mold of a channel pattern and nanoimprint to duplicate such channel. The centimeter-long channel continuity is verified by flowing fluorescent dye-stained water and stretching and transporting DNAs. The 18 by 20 nm channel cross-section was confirmed by measuring the liquid conductance in the channel.

Original languageEnglish (US)
Pages (from-to)3774-3780
Number of pages7
JournalNano Letters
Volume7
Issue number12
DOIs
StatePublished - Dec 2007

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering

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