Abstract
The fabrication of silicon cones on a (100) silicon wafer was reported. The silica microspheres on a quartz support is used as a microlens system for laser-induced single-step fabrication of arrays of silicon cones. The silicone-cone arrays were fabricated with single-pulse 258 nm KrF laser radiation. It was observed that the volume of silicon increases during solidification.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 692-693 |
| Number of pages | 2 |
| Journal | Applied Physics Letters |
| Volume | 82 |
| Issue number | 5 |
| DOIs | |
| State | Published - Feb 3 2003 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)