The fabrication of silicon cones on a (100) silicon wafer was reported. The silica microspheres on a quartz support is used as a microlens system for laser-induced single-step fabrication of arrays of silicon cones. The silicone-cone arrays were fabricated with single-pulse 258 nm KrF laser radiation. It was observed that the volume of silicon increases during solidification.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)