Single-step fabrication of silicon-cone arrays

Gerard Wysocki, R. Denk, K. Piglmayer, N. Arnold, D. Bäuerle

Research output: Contribution to journalArticle

61 Scopus citations

Abstract

The fabrication of silicon cones on a (100) silicon wafer was reported. The silica microspheres on a quartz support is used as a microlens system for laser-induced single-step fabrication of arrays of silicon cones. The silicone-cone arrays were fabricated with single-pulse 258 nm KrF laser radiation. It was observed that the volume of silicon increases during solidification.

Original languageEnglish (US)
Pages (from-to)692-693
Number of pages2
JournalApplied Physics Letters
Volume82
Issue number5
DOIs
StatePublished - Feb 3 2003

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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