Single-step fabrication of silicon-cone arrays

Gerard Wysocki; R. Denk; K. Piglmayer; N. Arnold; D. Bäuerle

doi:10.1063/1.1538347

Single-step fabrication of silicon-cone arrays

Gerard Wysocki, R. Denk, K. Piglmayer, N. Arnold, D. Bäuerle

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66 Scopus citations

Abstract

The fabrication of silicon cones on a (100) silicon wafer was reported. The silica microspheres on a quartz support is used as a microlens system for laser-induced single-step fabrication of arrays of silicon cones. The silicone-cone arrays were fabricated with single-pulse 258 nm KrF laser radiation. It was observed that the volume of silicon increases during solidification.

Original language	English (US)
Pages (from-to)	692-693
Number of pages	2
Journal	Applied Physics Letters
Volume	82
Issue number	5
DOIs	https://doi.org/10.1063/1.1538347
State	Published - Feb 3 2003

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.1538347

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title = "Single-step fabrication of silicon-cone arrays",

abstract = "The fabrication of silicon cones on a (100) silicon wafer was reported. The silica microspheres on a quartz support is used as a microlens system for laser-induced single-step fabrication of arrays of silicon cones. The silicone-cone arrays were fabricated with single-pulse 258 nm KrF laser radiation. It was observed that the volume of silicon increases during solidification.",

author = "Gerard Wysocki and R. Denk and K. Piglmayer and N. Arnold and D. B{\"a}uerle",

year = "2003",

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doi = "10.1063/1.1538347",

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T1 - Single-step fabrication of silicon-cone arrays

AU - Wysocki, Gerard

AU - Denk, R.

AU - Piglmayer, K.

AU - Arnold, N.

AU - Bäuerle, D.

PY - 2003/2/3

Y1 - 2003/2/3

N2 - The fabrication of silicon cones on a (100) silicon wafer was reported. The silica microspheres on a quartz support is used as a microlens system for laser-induced single-step fabrication of arrays of silicon cones. The silicone-cone arrays were fabricated with single-pulse 258 nm KrF laser radiation. It was observed that the volume of silicon increases during solidification.

AB - The fabrication of silicon cones on a (100) silicon wafer was reported. The silica microspheres on a quartz support is used as a microlens system for laser-induced single-step fabrication of arrays of silicon cones. The silicone-cone arrays were fabricated with single-pulse 258 nm KrF laser radiation. It was observed that the volume of silicon increases during solidification.

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DO - 10.1063/1.1538347

M3 - Article

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SP - 692

EP - 693

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 5

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Single-step fabrication of silicon-cone arrays

Abstract

All Science Journal Classification (ASJC) codes

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