Single-lens dynamic z -scanning for simultaneous in situ position detection and laser processing focus control

Keyphrases

• In Situ 100%
• Laser Processing 100%
• Focus Control 100%
• Surface Detection 100%
• Single Lens 100%
• Position Detection 100%
• Dual-beam 33%
• Order of Magnitude 33%
• Temporal Response 33%
• Alignment Process 33%
• Three-order 33%
• Detection Method 33%
• Optical Element 33%
• Processing Speed 33%
• Position Information 33%
• Nonlinear Error 33%
• Dynamic Surface 33%
• Three-dimensional Space 33%
• Probe Beam 33%
• Processing Bottleneck 33%
• Detection Range 33%
• High Repeatability 33%
• Focusing Technique 33%
• Axial Alignment 33%
• Confocal Optics 33%
• Advanced Manufacturing Processes 33%
• Surface Tracking 33%
• Focal Control 33%
• Autofocus 33%
• Beam Scanning 33%
• Oscillation Phase 33%
• Detective Controls 33%
• Stage Motion 33%

Physics

• Lens 100%
• Optics 33%
• Optical Element 33%