Single-crystal epitaxial thin films of the isotropic metallic oxides Sr1-xCaxRuO3 (O ≤ × ≤ 1)

C. B. Eom, R. J. Cava, R. M. Fleming, Julia M. Phillips, R. B. Van Dover, J. H. Marshall, J. W.P. Hsu, J. J. Krajewski, W. F. Peck

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Abstract

Single-crystal epitaxial thin films of the isotropic metallic oxides Sr1-xCaxRuO3 (O ≤ × ≤ 1) were grown on miscut SrTiO3(100) substrates in situ by 90° off-axis sputtering. These thin films exhibit low isotropic resistivities, excellent chemical and thermal stability, good surface smoothness, and high crystalline quality. Furthermore, the lattice parameters and magnetic properties can be varied by simply changing the strontium/calcium ratio. These epitaxial thin films, and their multilayer structures with other oxide materials, can be used for the fabrication of superconducting, ferroelectric, magneto-optic, and electro-optic devices.

Original languageEnglish (US)
Pages (from-to)1766-1769
Number of pages4
JournalScience
Volume258
Issue number5089
DOIs
StatePublished - Jan 1 1992
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • General

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    Eom, C. B., Cava, R. J., Fleming, R. M., Phillips, J. M., Van Dover, R. B., Marshall, J. H., Hsu, J. W. P., Krajewski, J. J., & Peck, W. F. (1992). Single-crystal epitaxial thin films of the isotropic metallic oxides Sr1-xCaxRuO3 (O ≤ × ≤ 1). Science, 258(5089), 1766-1769. https://doi.org/10.1126/science.258.5089.1766