Simulated reaction dynamics of F atoms on partially fluorinated Si(100) surfaces

Physics & Astronomy

• reactivity 57%
• atoms 48%
• molecules 20%
• fluorine 19%
• energy distribution 17%
• angular distribution 16%
• adsorption 14%
• simulation 14%
• trends 14%
• molecular dynamics 13%
• products 12%
• excitation 9%
• interactions 7%
• energy 5%

Engineering & Materials Science

• Atoms 100%
• Molecules 37%
• Angular distribution 30%
• Fluorine 26%
• Molecular dynamics 21%
• Adsorption 18%
• Computer simulation 10%

Chemical Compounds

• Surface 30%
• Simulation 24%
• Energy 18%
• Fluorine Atom 16%
• Molecular Dynamics 14%
• Molecule 13%
• Adsorption 9%