The use of optical transmission at 1.3 and 1.55 μm is reported to measure the temperature of silicon wafers in a rapid thermal processing environment. Physically, as the wafer temperature increases, infrared transmission drops due to band-gap reduction and an increased phonon population. This method has been used to measure wafer temperature with a resolution of several degrees from 400 to 800°C, and is compatible with the thick quartz walls of the processing chamber. As part of this work, the absorption constant of silicon at 1.3 and 1.55 μm from 400 to 800°C has also been measured.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)