@inproceedings{5832fbb3635f4f0e88a2918faafc94ee,
title = "Silicon photonic integrated circuit for on-chip spectroscopic gas sensing",
abstract = "We present a chip-scale spectroscopic methane sensor, incorporating a tunable laser, sensor waveguides, and methane reference cell, assembled as a compact silicon photonic integrated circuit. The sensor incorporates an InP-based semiconductor optical amplifier/photodetector array, flip-chip soldered onto a silicon photonic substrate using highprecision waveguide-to-waveguide interfaces. The InP chip provides gain for a hybrid external cavity laser operating at 1650 nm. The sensor features a 20-cm-long TM-mode evanescent-field waveguide as the sensing element and is compatible with high-volume wafer-scale silicon photonics manufacturing and assembly processes. This sensor can be an enabling platform for economical methane and more general distributed environmental trace-gas monitoring.",
keywords = "Gas sensing, Methane sensing, Silicon photonics, Tunable diode laser absorption spectroscopy",
author = "Chi Xiong and Yves Martin and Zhang, {Eric J.} and Orcutt, {Jason S.} and Martin Glodde and Laurent Schares and Tymon Barwicz and Teng, {Chu C.} and Gerard Wysocki and Green, {William M.J.}",
note = "Funding Information: The information, data, or work presented herein was funded in part by the Advanced Research Projects Agency-Energy (ARPA-E), U.S. Department of Energy, under Award Number DE-AR0000540. The views and opinions of authors expressed herein do not necessarily state or reflect those of the United States Government or any agency thereof. The authors recognize the staff at the IBM Microelectronics Research Laboratory (Nathan Marchack, Elizabeth Duch, Swetha Kamlapurkar, Sebastian Engelmann) and Central Scientific Services (Nigel Hinds, Tom Picunko, Russell Wilson) for their assistance with sensor fabrication and assembly. They would also like to thank Levente Klein, Theodore van Kessel, Ramachandran Muralidhar, Norma Sosa, and Hendrik Hamann (all of IBM Research) for many productive discussions. Publisher Copyright: {\textcopyright} 2019 SPIE.; Silicon Photonics XIV 2019 ; Conference date: 04-02-2019 Through 06-02-2019",
year = "2019",
doi = "10.1117/12.2511793",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Reed, {Graham T.} and Knights, {Andrew P.}",
booktitle = "Silicon Photonics XIV",
address = "United States",
}