Silicon photonic integrated circuit for on-chip spectroscopic gas sensing

Chi Xiong, Yves Martin, Eric J. Zhang, Jason S. Orcutt, Martin Glodde, Laurent Schares, Tymon Barwicz, Chu C. Teng, Gerard Wysocki, William M.J. Green

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations


We present a chip-scale spectroscopic methane sensor, incorporating a tunable laser, sensor waveguides, and methane reference cell, assembled as a compact silicon photonic integrated circuit. The sensor incorporates an InP-based semiconductor optical amplifier/photodetector array, flip-chip soldered onto a silicon photonic substrate using highprecision waveguide-to-waveguide interfaces. The InP chip provides gain for a hybrid external cavity laser operating at 1650 nm. The sensor features a 20-cm-long TM-mode evanescent-field waveguide as the sensing element and is compatible with high-volume wafer-scale silicon photonics manufacturing and assembly processes. This sensor can be an enabling platform for economical methane and more general distributed environmental trace-gas monitoring.

Original languageEnglish (US)
Title of host publicationSilicon Photonics XIV
EditorsGraham T. Reed, Andrew P. Knights
ISBN (Electronic)9781510624887
StatePublished - 2019
EventSilicon Photonics XIV 2019 - San Francisco, United States
Duration: Feb 4 2019Feb 6 2019

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceSilicon Photonics XIV 2019
Country/TerritoryUnited States
CitySan Francisco

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


  • Gas sensing
  • Methane sensing
  • Silicon photonics
  • Tunable diode laser absorption spectroscopy


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