@inproceedings{5832fbb3635f4f0e88a2918faafc94ee,
title = "Silicon photonic integrated circuit for on-chip spectroscopic gas sensing",
abstract = "We present a chip-scale spectroscopic methane sensor, incorporating a tunable laser, sensor waveguides, and methane reference cell, assembled as a compact silicon photonic integrated circuit. The sensor incorporates an InP-based semiconductor optical amplifier/photodetector array, flip-chip soldered onto a silicon photonic substrate using highprecision waveguide-to-waveguide interfaces. The InP chip provides gain for a hybrid external cavity laser operating at 1650 nm. The sensor features a 20-cm-long TM-mode evanescent-field waveguide as the sensing element and is compatible with high-volume wafer-scale silicon photonics manufacturing and assembly processes. This sensor can be an enabling platform for economical methane and more general distributed environmental trace-gas monitoring.",
keywords = "Gas sensing, Methane sensing, Silicon photonics, Tunable diode laser absorption spectroscopy",
author = "Chi Xiong and Yves Martin and Zhang, {Eric J.} and Orcutt, {Jason S.} and Martin Glodde and Laurent Schares and Tymon Barwicz and Teng, {Chu C.} and Gerard Wysocki and Green, {William M.J.}",
note = "Publisher Copyright: {\textcopyright} 2019 SPIE.; Silicon Photonics XIV 2019 ; Conference date: 04-02-2019 Through 06-02-2019",
year = "2019",
doi = "10.1117/12.2511793",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Reed, {Graham T.} and Knights, {Andrew P.}",
booktitle = "Silicon Photonics XIV",
address = "United States",
}