Silicon Photodetector Structure for Direct Coupling of Optical Fibers to Integrated Circuits

Robert W. Ade, Edward E. Harstead, A. H. Amirfazli, Theodore Cacouris, Eric R. Fossum, Paul R. Prucnal, Richard M. Osgood

Research output: Contribution to journalArticle

8 Scopus citations

Abstract

A novel detector structure exhibiting real-estate efficient coupling of optical fibers to semiconductor devices is described. The integrated fiberoptic coupler employs vertical insertion of a tapered single-mode fiber into a laser-etched cylindrical hole in the substrate. It features a small surface footprint, mechanical stability, and accurate alignment. Fabricated in silicon, the p-n junction detectors have typically shown responsivities of 0.23 A/W at 0.63 μm, corresponding to a quantum efficiency of 45 percent, and dark currents below 1 nA.

Original languageEnglish (US)
Pages (from-to)1283-1289
Number of pages7
JournalIEEE Transactions on Electron Devices
Volume34
Issue number6
DOIs
StatePublished - Jun 1987
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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