Silicon nanowire grid polarizer for very deep ultraviolet fabricated from a shear-aligned diblock copolymer template

Material Science

• Silicon 100%
• Copolymer 100%
• Nanowire 100%
• Polarizer 100%
• Silicon Dioxide 25%
• Reactive Ion Etching 25%
• Polystyrene 25%
• Amorphous Silicon 25%

Keyphrases

• Block Copolymer Template 100%
• Nanowire-grid Polarizer 100%
• Nanowire Grids 66%
• Amorphous Silicon Thin Film 33%
• UV Reflectance 33%
• Polarizer 33%
• Ultraviolet Transmission 33%
• Ultraviolet Range 33%
• Plasma Frequency 33%
• Fused Silica Substrate 33%

Engineering

• Fused Silica 33%
• Centimeter 33%
• Reflectance 33%
• Silicon Layer 33%