Silicon epitaxial growth on the Si(001)2×1 surface from silane using dynamic Monte Carlo simulations

Koji Satake; David B. Graves

doi:10.1063/1.1559151

Silicon epitaxial growth on the Si(001)2×1 surface from silane using dynamic Monte Carlo simulations

Koji Satake, David B. Graves

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

A presentation of the kinetic model which explains the silicon epitaxial growth in terms of the microscopic view is given. Recently various kinetics of elementary reactions on the silicon surface are clarified energetically by ab initio calculations. In order to incorporate such elementary reactions into the numerical model, dynamic Monte Carlo (DMC) is applied.

Original language	English (US)
Pages (from-to)	6503-6511
Number of pages	9
Journal	Journal of Chemical Physics
Volume	118
Issue number	14
DOIs	https://doi.org/10.1063/1.1559151
State	Published - Apr 8 2003
Externally published	Yes

All Science Journal Classification (ASJC) codes

General Physics and Astronomy
Physical and Theoretical Chemistry

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10.1063/1.1559151

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title = "Silicon epitaxial growth on the Si(001)2×1 surface from silane using dynamic Monte Carlo simulations",

abstract = "A presentation of the kinetic model which explains the silicon epitaxial growth in terms of the microscopic view is given. Recently various kinetics of elementary reactions on the silicon surface are clarified energetically by ab initio calculations. In order to incorporate such elementary reactions into the numerical model, dynamic Monte Carlo (DMC) is applied.",

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AU - Graves, David B.

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AB - A presentation of the kinetic model which explains the silicon epitaxial growth in terms of the microscopic view is given. Recently various kinetics of elementary reactions on the silicon surface are clarified energetically by ab initio calculations. In order to incorporate such elementary reactions into the numerical model, dynamic Monte Carlo (DMC) is applied.

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Silicon epitaxial growth on the Si(001)2×1 surface from silane using dynamic Monte Carlo simulations

Abstract

All Science Journal Classification (ASJC) codes

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