Silicide/Si1-xGex Schottky-barrier long-wavelength infrared detectors

X. Xiao, J. C. Sturm, S. R. Parihar, S. A. Lyon, D. Meyerhofer, S. Palfrey

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

In this paper, we demonstrate for the first time both Pd2Si/Si1-xGex and PtSi/Si1-xGex Schottky-barrier long-wavelength infrared detectors. By employing a thin silicon sacrificial cap layer for silicide formation, Ge segregation effects and consequent Fermi level pinning when metal directly reacts with Si1-xGex alloy are eliminated. The Schottky barrier height of the silicide/Si1-xGex detector measured by internal photoemission decreases with increasing Ge fraction, allowing tuning of its cutoff wavelength. The cut-off wavelength has been extended beyond 8 mu m in PtSi/Si0.85Ge0.15 detectors. It has been shown that high quantum efficiency and ideally low leakage can be obtained from these detectors. The fabrication processes are easily integrable with the current PtSi/Si focal-plane-array technology.

Original languageEnglish (US)
Title of host publication1992 International Technical Digest on Electron Devices Meeting, IEDM 1992
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages125-128
Number of pages4
ISBN (Electronic)0780308174
DOIs
StatePublished - Jan 1 1992
Event1992 International Technical Digest on Electron Devices Meeting, IEDM 1992 - San Francisco, United States
Duration: Dec 13 1992Dec 16 1992

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
Volume1992-December
ISSN (Print)0163-1918

Conference

Conference1992 International Technical Digest on Electron Devices Meeting, IEDM 1992
CountryUnited States
CitySan Francisco
Period12/13/9212/16/92

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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    Xiao, X., Sturm, J. C., Parihar, S. R., Lyon, S. A., Meyerhofer, D., & Palfrey, S. (1992). Silicide/Si1-xGex Schottky-barrier long-wavelength infrared detectors. In 1992 International Technical Digest on Electron Devices Meeting, IEDM 1992 (pp. 125-128). [307324] (Technical Digest - International Electron Devices Meeting, IEDM; Vol. 1992-December). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IEDM.1992.307324