SiGe single-hole transistor fabricated by AFM oxidation and epitaxial regrowth

Keyphrases

• SiGe 100%
• Epitaxial Regrowth 100%
• Single-hole Transistors 100%
• Electron Beam 50%
• Heterojunction 50%
• Low Energy 50%
• Quantum Devices 50%
• Pattern-based Approach 50%
• Passivation 50%
• Coulomb Blockade Oscillation 50%
• Quantum Dot Devices 50%
• Carrier Confinement 50%
• Process-based 50%
• Si-based 50%
• SiGe Heterojunction 50%
• AFM Lithography 50%

Engineering

• Heterojunctions 100%
• Transistor 100%
• Lithography 50%
• Coulomb Blockade 50%
• Passivation 50%
• Quantum Dot 50%
• Patterning Process 50%

Material Science

• Heterojunction 100%
• Transistor 100%
• Reactive Ion Etching 50%
• Quantum Device 50%
• Quantum Dot 50%
• Lithography 50%