Fingerprint
Dive into the research topics of 'Self-limited self-perfection by liquefaction for sub-20nm trench/line fabrication'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Self-limited self-perfection by liquefaction for sub-20nm trench/line fabrication
Yixing Liang, Patrick Murphy, Wen Di Li, Stephen Y. Chou
Research output: Contribution to journal › Article › peer-review
9
Scopus
citations