Self-consistent modeling of nonlocal inductively coupled plasmas

In low-pressure radio-frequency (RF) discharges, the electron-energy distribution function (EEDF) is typically non-Maxwellian for low plasma density. The nonlocal plasma conductivity, plasma density profiles, and EEDF are all nonlinear and nonlocally coupled. For accurate calculation of the discharge characteristics, the EEDF needs to be computed self-consistently. The method of fast self-consistent one-dimensional of planar inductively coupled discharges driven by a RF electromagnetic field is presented. The effects of a non-Maxwellian EEDF, plasma nonuniformity, and finite size, as well as the influence of the external magnetic field on the plasma properties are considered and discussed.