We have designed and fabricated double-sided a.c.-coupled silicon strip detectors on high-resistivity substrates. We discuss the first electrical measurements on a 16 cm2 strip detector. These detectors are biased via polysilicon resistors on both sides and the decoupling capacitors are integrated on the strip themselves. For a large fraction of the fabricated detectors, the current densities are about 15 nA/cm2 and the yield of the integrated capacitor is about 99%, without any sign of breakdown up to 100V (the maximum voltage we have applied).
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
- Nuclear and High Energy Physics
- Astronomy and Astrophysics