Reply to "Comment on A new model of the rapid initial oxidation of silicon'"

S. A. Schafer; S. A. Lyon

doi:10.1063/1.341802

Reply to "Comment on A new model of the rapid initial oxidation of silicon'"

S. A. Schafer, S. A. Lyon

Research output: Contribution to journal › Article › peer-review

Abstract

The inconsistencies with experiment claimed by Y. Z. Lu and Y. C. Cheng, J. Appl. Phys. 64, 1607 (1988), are only apparent.

Original language	English (US)
Pages (from-to)	1610-1611
Number of pages	2
Journal	Journal of Applied Physics
Volume	64
Issue number	3
DOIs	https://doi.org/10.1063/1.341802
State	Published - 1988

All Science Journal Classification (ASJC) codes

General Physics and Astronomy

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10.1063/1.341802

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abstract = "The inconsistencies with experiment claimed by Y. Z. Lu and Y. C. Cheng, J. Appl. Phys. 64, 1607 (1988), are only apparent.",

author = "Schafer, {S. A.} and Lyon, {S. A.}",

year = "1988",

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Reply to "Comment on A new model of the rapid initial oxidation of silicon'"

Abstract

All Science Journal Classification (ASJC) codes

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