Reply to "Comment on A new model of the rapid initial oxidation of silicon'"

S. A. Schafer, Stephen Aplin Lyon

Research output: Contribution to journalArticle

Abstract

The inconsistencies with experiment claimed by Y. Z. Lu and Y. C. Cheng, J. Appl. Phys. 64, 1607 (1988), are only apparent.

Original languageEnglish (US)
Pages (from-to)1610-1611
Number of pages2
JournalJournal of Applied Physics
Volume64
Issue number3
DOIs
StatePublished - Dec 1 1988

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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