Relaxation of a strained elastic film on a viscous layer

R. Huang, H. Yin, J. Liang, K. D. Hobart, J. C. Sturm, Z. Suo

Research output: Contribution to journalArticlepeer-review

14 Scopus citations


Experiments were conducted with SiGe film islands on a layer of borophosphorosilicate glass (BSPG). Initially the SiGe is under compression. Upon annealing, the glass flows and the SiGe islands relax by both inplane expansion and wrinkling. This paper provides a two-dimensional (2D) model for inplane expansion. The results from the model are compared with the experiments with small SiGe islands. The effect of winkling, which is ignored in the present model, is discussed qualitatively.

Original languageEnglish (US)
Pages (from-to)115-120
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
StatePublished - 2002

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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