Reduction of residual charge in surface-neutralization-based neutral beams

M. J. Goeckner, T. K. Bennett, Jaeyoung Park, Z. Wang, Samuel A. Cohen

Research output: Contribution to conferencePaper

12 Scopus citations

Abstract

Hyperthermal-neutral beams have been proposed as a charge-free alternative to plasmas in select processing steps. Existing prototype sources include three generic types: gas-dynamic, ion-neutral-charge-exchange and ion-surface-neutralization beam sources. We find that in surface-neutralization type sources, which have the highest flux, residual current can still flow to the substrate. However, this charged particle flux is several orders of magnitude smaller than the hyperthermal-neutral flux. Here we discuss the source of this residual current and methods for further reductions.

Original languageEnglish (US)
Pages175-178
Number of pages4
StatePublished - Jan 1 1997
EventProceedings of the 1997 2nd International Symposium on Plasma Process-Induced Damage - Monterey, CA, USA
Duration: May 13 1997May 14 1997

Other

OtherProceedings of the 1997 2nd International Symposium on Plasma Process-Induced Damage
CityMonterey, CA, USA
Period5/13/975/14/97

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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    Goeckner, M. J., Bennett, T. K., Park, J., Wang, Z., & Cohen, S. A. (1997). Reduction of residual charge in surface-neutralization-based neutral beams. 175-178. Paper presented at Proceedings of the 1997 2nd International Symposium on Plasma Process-Induced Damage, Monterey, CA, USA, .