Reduction of residual charge in surface-neutralization-based neutral beams

M. J. Goeckner; T. K. Bennett; Jaeyoung Park; Z. Wang; S. A. Cohen

Reduction of residual charge in surface-neutralization-based neutral beams

M. J. Goeckner, T. K. Bennett, Jaeyoung Park, Z. Wang, S. A. Cohen

Research output: Contribution to conference › Paper › peer-review

Abstract

Hyperthermal-neutral beams have been proposed as a charge-free alternative to plasmas in select processing steps. Existing prototype sources include three generic types: gas-dynamic, ion-neutral-charge-exchange and ion-surface-neutralization beam sources. We find that in surface-neutralization type sources, which have the highest flux, residual current can still flow to the substrate. However, this charged particle flux is several orders of magnitude smaller than the hyperthermal-neutral flux. Here we discuss the source of this residual current and methods for further reductions.

Original language	English (US)
Pages	175-178
Number of pages	4
State	Published - 1997
Event	Proceedings of the 1997 2nd International Symposium on Plasma Process-Induced Damage - Monterey, CA, USA Duration: May 13 1997 → May 14 1997

Other

Other	Proceedings of the 1997 2nd International Symposium on Plasma Process-Induced Damage
City	Monterey, CA, USA
Period	5/13/97 → 5/14/97

All Science Journal Classification (ASJC) codes

General Engineering

Cite this

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title = "Reduction of residual charge in surface-neutralization-based neutral beams",

abstract = "Hyperthermal-neutral beams have been proposed as a charge-free alternative to plasmas in select processing steps. Existing prototype sources include three generic types: gas-dynamic, ion-neutral-charge-exchange and ion-surface-neutralization beam sources. We find that in surface-neutralization type sources, which have the highest flux, residual current can still flow to the substrate. However, this charged particle flux is several orders of magnitude smaller than the hyperthermal-neutral flux. Here we discuss the source of this residual current and methods for further reductions.",

author = "Goeckner, {M. J.} and Bennett, {T. K.} and Jaeyoung Park and Z. Wang and Cohen, {S. A.}",

year = "1997",

language = "English (US)",

pages = "175--178",

note = "Proceedings of the 1997 2nd International Symposium on Plasma Process-Induced Damage ; Conference date: 13-05-1997 Through 14-05-1997",

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TY - CONF

T1 - Reduction of residual charge in surface-neutralization-based neutral beams

AU - Goeckner, M. J.

AU - Bennett, T. K.

AU - Park, Jaeyoung

AU - Wang, Z.

AU - Cohen, S. A.

PY - 1997

Y1 - 1997

N2 - Hyperthermal-neutral beams have been proposed as a charge-free alternative to plasmas in select processing steps. Existing prototype sources include three generic types: gas-dynamic, ion-neutral-charge-exchange and ion-surface-neutralization beam sources. We find that in surface-neutralization type sources, which have the highest flux, residual current can still flow to the substrate. However, this charged particle flux is several orders of magnitude smaller than the hyperthermal-neutral flux. Here we discuss the source of this residual current and methods for further reductions.

AB - Hyperthermal-neutral beams have been proposed as a charge-free alternative to plasmas in select processing steps. Existing prototype sources include three generic types: gas-dynamic, ion-neutral-charge-exchange and ion-surface-neutralization beam sources. We find that in surface-neutralization type sources, which have the highest flux, residual current can still flow to the substrate. However, this charged particle flux is several orders of magnitude smaller than the hyperthermal-neutral flux. Here we discuss the source of this residual current and methods for further reductions.

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UR - http://www.scopus.com/inward/citedby.url?scp=0030704012&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0030704012

SP - 175

EP - 178

T2 - Proceedings of the 1997 2nd International Symposium on Plasma Process-Induced Damage

Y2 - 13 May 1997 through 14 May 1997

ER -

Reduction of residual charge in surface-neutralization-based neutral beams

Abstract

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All Science Journal Classification (ASJC) codes

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