Reduced buckling in one dimension versus two dimensions of a compressively strained film on a compliant substrate

R. L. Peterson, K. D. Hobart, F. J. Kub, H. Yin, J. C. Sturm

Research output: Contribution to journalArticle

13 Scopus citations

Abstract

Compliant substrates are useful for manipulating the strain state of thin films. However the compliant layer may permit undesirable roughening (buckling) of a compressively strained film. In this work, we quantitatively compare two-dimensional and one-dimensional buckling in thin silicon-germanium films under biaxial and uniaxial compressive stresses, respectively. For the same strain level, films with one-dimensional stress and thus one-dimensional buckling exhibit slower buckling and lower final steady state buckling amplitude, which makes them technologically advantageous compared to biaxially strained films, which exhibit two-dimensional buckling. The results are explained through modeling.

Original languageEnglish (US)
Article number201913
JournalApplied Physics Letters
Volume88
Issue number20
DOIs
StatePublished - May 15 2006

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Fingerprint Dive into the research topics of 'Reduced buckling in one dimension versus two dimensions of a compressively strained film on a compliant substrate'. Together they form a unique fingerprint.

  • Cite this