TY - JOUR
T1 - Real-time TEM imaging of the formation of crystalline nanoscale gaps
AU - Strachan, Douglas R.
AU - Johnston, Danvers E.
AU - Guiton, Beth S.
AU - Datta, Sujit S.
AU - Davies, Peter K.
AU - Bonnell, Dawn A.
AU - Johnson, A. T.Charlie
PY - 2008/2/7
Y1 - 2008/2/7
N2 - We present real-time transmission electron microscopy of nanogap formation by feedback controlled electromigration that reveals a remarkable degree of crystalline order. Crystal facets appear during feedback controlled electromigration indicating a layer-by-layer, highly reproducible electromigration process avoiding thermal runaway and melting. These measurements provide insight into the electromigration induced failure mechanism in sub-20 nm size interconnects, indicating that the current density at failure increases as the width decreases to approximately 1 nm.
AB - We present real-time transmission electron microscopy of nanogap formation by feedback controlled electromigration that reveals a remarkable degree of crystalline order. Crystal facets appear during feedback controlled electromigration indicating a layer-by-layer, highly reproducible electromigration process avoiding thermal runaway and melting. These measurements provide insight into the electromigration induced failure mechanism in sub-20 nm size interconnects, indicating that the current density at failure increases as the width decreases to approximately 1 nm.
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U2 - 10.1103/PhysRevLett.100.056805
DO - 10.1103/PhysRevLett.100.056805
M3 - Article
C2 - 18352410
AN - SCOPUS:38949163596
VL - 100
JO - Physical Review Letters
JF - Physical Review Letters
SN - 0031-9007
IS - 5
M1 - 056805
ER -