Fingerprint
Dive into the research topics of 'Reactor wall effects in Si-Cl2-Ar atomic layer etching'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Reactor wall effects in Si-Cl2-Ar atomic layer etching
- Joseph R. Vella
- , Mahmoud A.I. Elgarhy
- , Qinzhen Hao
- , Vincent M. Donnelly
- , David B. Graves
Research output: Contribution to journal › Article › peer-review
7
Scopus
citations