Abstract
Single crystal Al(110) was hydroxylated in UHV to give a disordered overlayer. Protolytically labile tetraneopentylzirconium did not react with hydroxylated Al(110) in UHV, which was interpreted through a mechanistic proposal for proton-transfer-based surface chemical modification. According to this proposal, a zirconium alkoxide, although less thermodynamically basic than a zirconium alkyl, could be a kinetically viable substrate for proton-transfer-based organometallic chemical vapor deposition (MOCVD) in UHV, and tetra-tert-butoxyzirconium did react with hydroxylated Al(110) to give a surface bound di-tert-butoxyzirconium species. The deposition reaction was readily studied by HREELS, XPS, and AES.
Original language | English (US) |
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Pages (from-to) | 4037-4041 |
Number of pages | 5 |
Journal | Journal of the American Chemical Society |
Volume | 117 |
Issue number | 14 |
DOIs | |
State | Published - Apr 1995 |
All Science Journal Classification (ASJC) codes
- Catalysis
- General Chemistry
- Biochemistry
- Colloid and Surface Chemistry