A scanning arc lamp annealing system has been built using a 3-in.-long mercury arc lamp with an elliptical reflector. The reflector focuses the light into a high intensity narrow line source. Silicon wafers implanted with 100-KeV 75As+ to 1×1015 cm-2 have been uniformly annealed with a single scan, resulting in complete activation and negligible redistribution of the implanted species. Using a scan rate of 1 cm/s, entire 3-in. wafers have been annealed in less than 10 sec with this system.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)