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Quantum chemistry model of surface reactions and kinetic model of diamond growth: Effects of CH
3
radicals and C
2
H
2
molecules at low-temperatures CVD
Yu Barsukov
,
I. D. Kaganovich
,
M. Mokrov
,
A. Khrabry
Plasma Physics Lab
PPPL Discovery Plasma Science
Andlinger Center for Energy & the Environment
Research output
:
Contribution to journal
›
Article
›
peer-review
1
Scopus citations
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Dive into the research topics of 'Quantum chemistry model of surface reactions and kinetic model of diamond growth: Effects of CH
3
radicals and C
2
H
2
molecules at low-temperatures CVD'. Together they form a unique fingerprint.
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Chemistry
Chemical Element
50%
Chemical Kinetics Characteristics
100%
Chemical Vapor Deposition
100%
Critical Temperature
50%
formation
50%
Hydrogen
50%
Nucleation
50%
Phase Composition
50%
Quantum Chemistry
100%
Surface Reaction
100%
Engineering
Broad Range
12%
Chemical Vapor Deposition
100%
Diamond
100%
Gas Composition
12%
Gas-Phase
12%
Hydrogen Abstraction
12%
Kinetic Model
100%
Low-Temperature
100%
Reactant
25%
Reaction Model
100%
Substrate Temperature
25%
Material Science
Chemical Vapor Deposition
100%
Diamond
100%
Nucleation
12%
Phase Composition
12%
Surface (Surface Science)
37%
Surface Reaction
100%
Earth and Planetary Sciences
Chemical Element
50%
Quantum Chemistry
100%
Keyphrases
HACA Mechanism
14%
Low-temperature CVD
100%
Chemical Engineering
Chemical Element
50%