Quantum cascade lasers with double metal-semiconductor waveguide resonators

Karl Unterrainer, Raffaele Colombelli, Claire Gmachl, Federico Capasso, Harold Y. Hwang, A. Michael Sergent, Deborah L. Sivco, Alfred Y. Cho

Research output: Contribution to journalArticlepeer-review

98 Scopus citations

Abstract

Quantum cascade (QC) lasers with double metal-semiconductor waveguide resonators are reported for operating wavelengths of 19, 21, and 24 μm. The waveguides are based on surface-plasmon modes confined at the metal-semiconductor interfaces on both sides of the active region/injector stack and are not restricted by a cutoff wavelength for the TM polarized intersubband radiation. The double metal-semiconductor resonator devices are fabricated using an epilayer transfer process. Optical confinement factors close to 1 are obtained, with low waveguide losses. The performance of the devices is compared with that of QC lasers based on single-sided surface-plasmon waveguides. The concept of QC laser with double metal-semiconductor waveguide is applicable to a much wider wavelength range.

Original languageEnglish (US)
Pages (from-to)3060-3062
Number of pages3
JournalApplied Physics Letters
Volume80
Issue number17
DOIs
StatePublished - Apr 29 2002

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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