Abstract
A special topic in Physics of Plasma journal regarding electron kinetic effects in low temperature plasmas was dedicated to Professor Lev D. Tsendin, a pioneer and leader in this field. The Review paper by Godyak summarizes methods of EEDF control in gas discharge plasmas. The paper by Golubovskii reviews the latest developments of Tsendin's ideas about kinetic resonances and stratification of glow discharges. Yu. P. Raizer and M. S. Mokrov and S. Macheret and M. Shneyder investigate kinetic effects on physical mechanisms of self-organization in gas discharges of the Townsend type. The effects of magnetic fields on plasma self-organization are studied by V. A. Godyak, V. A. Rozhansky, and J.-Y. Kim, H.-C. Lee, Y.-D. Kim, Y.-C. Kim, and C.-W. Chung. Geometric effects of antenna size on electron kinetics in inductively coupled plasmas are also discussed.
| Original language | English (US) |
|---|---|
| Article number | 101501 |
| Journal | Physics of Plasmas |
| Volume | 20 |
| Issue number | 10 |
| DOIs | |
| State | Published - Oct 2013 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics