| Original language | English (US) |
|---|---|
| Article number | 061602 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 38 |
| Issue number | 6 |
| DOIs | |
| State | Published - Dec 1 2020 |
| Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films