Precise Control of Nanoscale Cu Etching via Gas-Phase Oxidation and Chemical Complexation

Ryan Sheil, J. Mark P. Martirez, Xia Sang, Emily A. Carter, Jane P. Chang

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Fingerprint

Dive into the research topics of 'Precise Control of Nanoscale Cu Etching via Gas-Phase Oxidation and Chemical Complexation'. Together they form a unique fingerprint.

Chemistry

Material Science

Keyphrases

Chemical Engineering