Polarimetry of thin metal transmission gratings in the resonance region and its impact on the response of metal-semiconductor-metal photodetectors

Erli Chen, Stephen Y. Chou

Research output: Contribution to journalArticle

11 Scopus citations

Abstract

The resonance behavior of metal transmission gratings and its impact on the response of metal-semiconductor-metal (MSM) photodetectors have been studied experimentally and theoretically. The metal gratings, with finger spacings in the subwavelength region of the visible light, were fabricated using e-beam lithography and lift-off. Strong resonances have been observed only in the S polarization. As a result, the light transmitted through a grating is primarily S polarized if the grating's finger spacing is less than one-third of the wavelength of the incident light, but P polarized otherwise. Similar phenomenon has been observed in the response of MSM photodetectors since the fingers (electrodes) of an MSM photodetector basically form a grating. Theoretical simulations employing the rigorous modal-expansion theory fairly predict the observed phenomenon.

Original languageEnglish (US)
Pages (from-to)2673-2675
Number of pages3
JournalApplied Physics Letters
Volume70
Issue number20
DOIs
StatePublished - May 19 1997
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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