Plasticity length scale in LIGA nickel MEMS structures

J. Lou, P. Shrotriya, S. Allameh, N. Yao, T. Buchheit, W. O. Soboyejo

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Fingerprint

Dive into the research topics of 'Plasticity length scale in LIGA nickel MEMS structures'. Together they form a unique fingerprint.

Physics & Astronomy

Chemical Compounds

Engineering & Materials Science