Plasticity length scale in LIGA nickel MEMS structures

J. Lou, P. Shrotriya, S. Allameh, N. Yao, T. Buchheit, W. O. Soboyejo

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

The plasticity length scale parameters associated with rotational and stretch gradients in LIGA nickel MEMS structures plated from sulfamate bath are presented in this paper. These are obtained from micro-bend and micro-tensile experiments on LIGA nickel films with different thicknesses. The composite length-scale parameter, lc is measured to be ∼ 4.8 μm for as-plated films (25, 50, 100 and 175 μm thick). The implications of the results are then discussed for the modeling of plasticity in LIGA nickel structures.

Original languageEnglish (US)
Pages (from-to)41-46
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume687
StatePublished - 2002

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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