Plasticity length scale in LIGA nickel MEMS structures

J. Lou; P. Shrotriya; S. Allameh; N. Yao; T. Buchheit; W. O. Soboyejo

Plasticity length scale in LIGA nickel MEMS structures

J. Lou, P. Shrotriya, S. Allameh, N. Yao, T. Buchheit, W. O. Soboyejo

Princeton Materials Institute

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

The plasticity length scale parameters associated with rotational and stretch gradients in LIGA nickel MEMS structures plated from sulfamate bath are presented in this paper. These are obtained from micro-bend and micro-tensile experiments on LIGA nickel films with different thicknesses. The composite length-scale parameter, l_c is measured to be ∼ 4.8 μm for as-plated films (25, 50, 100 and 175 μm thick). The implications of the results are then discussed for the modeling of plasticity in LIGA nickel structures.

Original language	English (US)
Pages (from-to)	41-46
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	687
State	Published - 2002

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

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title = "Plasticity length scale in LIGA nickel MEMS structures",

abstract = "The plasticity length scale parameters associated with rotational and stretch gradients in LIGA nickel MEMS structures plated from sulfamate bath are presented in this paper. These are obtained from micro-bend and micro-tensile experiments on LIGA nickel films with different thicknesses. The composite length-scale parameter, lc is measured to be ∼ 4.8 μm for as-plated films (25, 50, 100 and 175 μm thick). The implications of the results are then discussed for the modeling of plasticity in LIGA nickel structures.",

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T1 - Plasticity length scale in LIGA nickel MEMS structures

AU - Lou, J.

AU - Shrotriya, P.

AU - Allameh, S.

AU - Yao, N.

AU - Buchheit, T.

AU - Soboyejo, W. O.

PY - 2002

Y1 - 2002

N2 - The plasticity length scale parameters associated with rotational and stretch gradients in LIGA nickel MEMS structures plated from sulfamate bath are presented in this paper. These are obtained from micro-bend and micro-tensile experiments on LIGA nickel films with different thicknesses. The composite length-scale parameter, lc is measured to be ∼ 4.8 μm for as-plated films (25, 50, 100 and 175 μm thick). The implications of the results are then discussed for the modeling of plasticity in LIGA nickel structures.

AB - The plasticity length scale parameters associated with rotational and stretch gradients in LIGA nickel MEMS structures plated from sulfamate bath are presented in this paper. These are obtained from micro-bend and micro-tensile experiments on LIGA nickel films with different thicknesses. The composite length-scale parameter, lc is measured to be ∼ 4.8 μm for as-plated films (25, 50, 100 and 175 μm thick). The implications of the results are then discussed for the modeling of plasticity in LIGA nickel structures.

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M3 - Article

AN - SCOPUS:0036352756

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VL - 687

SP - 41

EP - 46

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

ER -

Plasticity length scale in LIGA nickel MEMS structures

Abstract

All Science Journal Classification (ASJC) codes

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