Plasma characterization of tetra™ III chrome etch system

Michael Grimbergen, D. G. Nest, Keven Yu, T. Y. Becky Leung, Madhavi Chandrachood, Alan Ouye, Saravjeet Singh, Ibrahim Ibrahim, Ajay Kumar, David Graves

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Physics & Astronomy

Mathematics

Engineering & Materials Science

Chemical Compounds