Plasma characterization of tetra™ III chrome etch system
- Michael Grimbergen
- , D. G. Nest
- , Keven Yu
- , T. Y. Becky Leung
- , Madhavi Chandrachood
- , Alan Ouye
- , Saravjeet Singh
- , Ibrahim Ibrahim
- , Ajay Kumar
- , David Graves
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution