Plasma and photon interactions with organosilicon polymers for directed self-assembly patterning applications
- Laurent Azarnouche
- , Stephen M. Sirard
- , William J. Durand
- , Gregory Blachut
- , Emir Gurer
- , Diane J. Hymes
- , Christopher J. Ellison
- , Carlton G. Willson
- , David B. Graves
Research output: Contribution to journal › Article › peer-review
11
Link opens in a new tab
Scopus
citations