Planarization of spin-coated films

Loni M. Peurrung, David B. Graves

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations


To measure film thickness profiles over substrates with surface topography in situ during spin coating, we use a pulsed laser, a microsfcope, and a 35-mm camera to stroboscopically create and image interference fringes. The measured film thickness profiles are compared to predictions from a model of the coating flow which accounts for centrifugal, capillary, and viscous forces. This model has been extended to include both radial and azimuthal variations so that the surface contours around fully three-dimensional features may be calculated. Profile asymmetry in the radial direction, known as "pile-up", is caused by surface tension forces near the edges of the feature that accelerate flow where the channel (the film thickness) narrows and retard flow where the film thickness widens.

Original languageEnglish (US)
Pages (from-to)578-584
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - Jun 1 1992
Externally publishedYes
EventOptical/Laser Microlithography V, MICROLITHOGRAPHY 1992 - San Jose, United States
Duration: Mar 8 1992Mar 12 1992

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


Dive into the research topics of 'Planarization of spin-coated films'. Together they form a unique fingerprint.

Cite this