Abstract
A spectroscopic technique is described for measuring the temperature of phosphorescent particles suspended in alow pressure rf plasma. The particles are found to be slightly hotter than the neutral gas temperature. This result is consistent with models of particle heating in a low pressure discharge. Also, we report on an entrainment device for introducing the phosphorescent particles (or other types of particles) into a discharge.
Original language | English (US) |
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Pages (from-to) | 1126-1131 |
Number of pages | 6 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 11 |
Issue number | 4 |
DOIs | |
State | Published - Jul 1993 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films