Particulate Temperature in Radio Frequency Glow Discharges

J. E. Daugherty, D. B. Graves

Research output: Contribution to journalArticlepeer-review

105 Scopus citations


A spectroscopic technique is described for measuring the temperature of phosphorescent particles suspended in alow pressure rf plasma. The particles are found to be slightly hotter than the neutral gas temperature. This result is consistent with models of particle heating in a low pressure discharge. Also, we report on an entrainment device for introducing the phosphorescent particles (or other types of particles) into a discharge.

Original languageEnglish (US)
Pages (from-to)1126-1131
Number of pages6
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number4
StatePublished - Jul 1993
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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