Parameters for feature evolution models in plasma etching from molecular dynamics simulation

Keyphrases

• Molecular Dynamics Simulation 100%
• Evolution Model 100%
• Plasma Etching 100%
• Feature Evolution 100%
• Surface Coverage 50%
• Si Surface 50%
• Incident Energy 50%
• Evolutionary Simulation 50%
• Surface Normal 50%
• Classical Molecular Dynamics 50%
• Surface Reaction Model 50%

Engineering

• Computer Simulation 100%
• Si Surface 100%
• Simulation Result 50%
• Incident Energy 50%
• Reaction Model 50%
• Surface Coverage 50%

Material Science

• Surface Reaction 100%
• Plasma Etching 100%