Parallel direct-write nanolithography using arrays of optically trapped microlenses

Euan McLeod; Craig B. Arnold

Parallel direct-write nanolithography using arrays of optically trapped microlenses

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We use Bessel beam optical traps to self-position arrays of microsphere objectives near surfaces. Pulsed laser illumination of these objectives is used to perform near-field direct- write subwavelength optical nanopatterning with 100 nm feature sizes.

Original language	English (US)
Title of host publication	Conference on Lasers and Electro-Optics, CLEO 2009
State	Published - Dec 1 2009
Event	Conference on Lasers and Electro-Optics, CLEO 2009 - Baltimore, MD, United States Duration: May 31 2009 → Jun 5 2009

Other

Other	Conference on Lasers and Electro-Optics, CLEO 2009
Country/Territory	United States
City	Baltimore, MD
Period	5/31/09 → 6/5/09

All Science Journal Classification (ASJC) codes

Instrumentation
Atomic and Molecular Physics, and Optics

Cite this

@inproceedings{d3e020ab9c024b42982919e4cdb407ff,

title = "Parallel direct-write nanolithography using arrays of optically trapped microlenses",

abstract = "We use Bessel beam optical traps to self-position arrays of microsphere objectives near surfaces. Pulsed laser illumination of these objectives is used to perform near-field direct- write subwavelength optical nanopatterning with 100 nm feature sizes.",

author = "Euan McLeod and Arnold, {Craig B.}",

year = "2009",

month = dec,

day = "1",

language = "English (US)",

isbn = "9781557528698",

booktitle = "Conference on Lasers and Electro-Optics, CLEO 2009",

note = "Conference on Lasers and Electro-Optics, CLEO 2009 ; Conference date: 31-05-2009 Through 05-06-2009",

}

TY - GEN

T1 - Parallel direct-write nanolithography using arrays of optically trapped microlenses

AU - McLeod, Euan

AU - Arnold, Craig B.

PY - 2009/12/1

Y1 - 2009/12/1

N2 - We use Bessel beam optical traps to self-position arrays of microsphere objectives near surfaces. Pulsed laser illumination of these objectives is used to perform near-field direct- write subwavelength optical nanopatterning with 100 nm feature sizes.

AB - We use Bessel beam optical traps to self-position arrays of microsphere objectives near surfaces. Pulsed laser illumination of these objectives is used to perform near-field direct- write subwavelength optical nanopatterning with 100 nm feature sizes.

UR - http://www.scopus.com/inward/record.url?scp=84894099968&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84894099968&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84894099968

SN - 9781557528698

BT - Conference on Lasers and Electro-Optics, CLEO 2009

T2 - Conference on Lasers and Electro-Optics, CLEO 2009

Y2 - 31 May 2009 through 5 June 2009

ER -

Parallel direct-write nanolithography using arrays of optically trapped microlenses

Abstract

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All Science Journal Classification (ASJC) codes

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