@article{5420dd6963b0418d8879c8d3bfe569ea,
title = "Papers from the 3rd international SiGe technology and device meeting (Princeton, New Jersey, USA, 15-17 May 2006) (ISTDM 2006)",
author = "J. Sturm and E. Fitzgerald and S. Koester and J. Kolodzey and J. Muroto and D. Paul and B. Tillack and S. Zaima and B. Ghyselen and S. Takagi",
year = "2007",
month = jan,
day = "1",
doi = "10.1088/0268-1242/22/1/E01",
language = "English (US)",
volume = "22",
pages = "E01",
journal = "Semiconductor Science and Technology",
issn = "0268-1242",
publisher = "IOP Publishing Ltd.",
number = "1",
}