Oxygen Incorporation during Low Temperature Chemical Vapor Deposition Growth of Epitaxial Silicon Films

J. C. Sturm

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Fingerprint

Dive into the research topics of 'Oxygen Incorporation during Low Temperature Chemical Vapor Deposition Growth of Epitaxial Silicon Films'. Together they form a unique fingerprint.

Material Science

Keyphrases

Engineering