Oxygen Incorporation during Low Temperature Chemical Vapor Deposition Growth of Epitaxial Silicon Films

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Fingerprint

Dive into the research topics of 'Oxygen Incorporation during Low Temperature Chemical Vapor Deposition Growth of Epitaxial Silicon Films'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds