Origins of asymmetry in spin-cast films over topography

Loni M. Manske, David B. Graves

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations


A pulsed laser, a microscope, and a 35-mm camera are used to stroboscopically create and image interference fringes around surface features during spin coating. The measured film thickness profiles are compared to predictions from a lubrication model. This model has been extended to two dimensions so that the surface contours around features of any width and length may be calculated, and preliminary results are reported. Profile asymmetry, or 'pile- up,' is caused by surface tension forces near the edges of the feature that accelerate flow where the channel (the film thickness) narrows and retard flow where the film thickness widens.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherPubl by Int Soc for Optical Engineering
Number of pages9
ISBN (Print)0819405620
StatePublished - 1991
Externally publishedYes
EventOptical/Laser Microlithography IV - San Jose, CA, USA
Duration: Mar 6 1991Mar 8 1991

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceOptical/Laser Microlithography IV
CitySan Jose, CA, USA

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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