TY - GEN
T1 - Origins of asymmetry in spin-cast films over topography
AU - Manske, Loni M.
AU - Graves, David B.
PY - 1991
Y1 - 1991
N2 - A pulsed laser, a microscope, and a 35-mm camera are used to stroboscopically create and image interference fringes around surface features during spin coating. The measured film thickness profiles are compared to predictions from a lubrication model. This model has been extended to two dimensions so that the surface contours around features of any width and length may be calculated, and preliminary results are reported. Profile asymmetry, or 'pile- up,' is caused by surface tension forces near the edges of the feature that accelerate flow where the channel (the film thickness) narrows and retard flow where the film thickness widens.
AB - A pulsed laser, a microscope, and a 35-mm camera are used to stroboscopically create and image interference fringes around surface features during spin coating. The measured film thickness profiles are compared to predictions from a lubrication model. This model has been extended to two dimensions so that the surface contours around features of any width and length may be calculated, and preliminary results are reported. Profile asymmetry, or 'pile- up,' is caused by surface tension forces near the edges of the feature that accelerate flow where the channel (the film thickness) narrows and retard flow where the film thickness widens.
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M3 - Conference contribution
AN - SCOPUS:0026396308
SN - 0819405620
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 414
EP - 422
BT - Proceedings of SPIE - The International Society for Optical Engineering
PB - Publ by Int Soc for Optical Engineering
T2 - Optical/Laser Microlithography IV
Y2 - 6 March 1991 through 8 March 1991
ER -