We demonstrate that material utilization efficiencies of 50% and deposition nonuniformities ≤ 2.5% are achievable over substrate diameters of 200 mm using a simplified, organic vapor phase deposition (OVPD) system. The OVPD system is used to demonstrate doped electrophosphorescent organic light emitting diodes whose performance is comparable to those grown by vacuum thermal evaporation. Through continuum modeling, we demonstrate that analogous systems whose chamber dimensions are comparable to the substrate width are scalable to substrate sizes of at least 1500×1800 mm2 with deposition nonuniformities between 1.5% and 2.5%. These results indicate that OVPD is useful in the large area deposition of displays, lighting, and other organic electronic devices.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)