Optimization of ultrafast axial scanning parameters for efficient pulsed laser micro-machining

Xiaohan Du, Seung Yeon Kang, Craig B. Arnold

Research output: Contribution to journalArticlepeer-review

8 Scopus citations


In order to achieve high-resolution micro-machined features, tight focusing is traditionally adopted in laser micro-machining systems, at the cost of a narrow axial machining range. As the laser energy is confined in a single, fixed focal spot, machining throughput is significantly constrained by the writing speed of either translation stages or galvanometer scanners. We study an ultrafast axial scanning technique that asynchronously distributes laser pulses along the axial direction. Oscillation of the focal spot induced by the tunable acoustic gradient index lens is visualized in borosilicate glass with femtosecond laser pulses. By tuning frequency and amplitude of the acoustic field, machining parameters can be optimized, as demonstrated by the case of line machining on silicon. Multi-pass groove machining with axial scanning on silicon as well as femtosecond laser cutting of battery separators exhibit an extended effective machining range and an improved machining efficiency for both focused and defocused surfaces.

Original languageEnglish (US)
Article number116850
JournalJournal of Materials Processing Technology
StatePublished - Feb 2021

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Computer Science Applications
  • Metals and Alloys
  • Industrial and Manufacturing Engineering


  • Laser micro-machining
  • Tunable optofluidic lens
  • Ultrafast scanning
  • Variable focal lens
  • Varifocal processing


Dive into the research topics of 'Optimization of ultrafast axial scanning parameters for efficient pulsed laser micro-machining'. Together they form a unique fingerprint.

Cite this