Optical trap assisted nanoscale laser direct-write patterning

James Joy, Euan McLeod, Craig B. Arnold

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Laser direct-write patterning methods are traditionally limited by the diffraction limit to size scales several hundreds of nanometers at the minimum. In this work, we demonstrate a new method of laser based patterning that overcomes these limitations by taking advantage of near-field enhancement at the surface of dielectric microspheres. Polystyrene microspheres are trapped in CW Bessel beam laser traps above a polyimide surface. A second, pulsed ultraviolet laser gets focused through the bead, and produces nanometer scale features on the substrate. The full width, half maximum of the features generated by this technique is measured and analyzed along with Finite Difference Time Domain simulations to predict the effects of bead size and pulsed laser energy. It is demonstrated that using a 0.76 μm sphere to focus the processing laser results in spots with an average size of 130 nm and a standard deviation of 38 nm, showing that spots with sizes below the diffraction limit can be generated.

Original languageEnglish (US)
Title of host publicationICALEO 2008 - 27th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings
Pages1-6
Number of pages6
StatePublished - Dec 1 2008
EventICALEO 2008 - 27th International Congress on Applications of Lasers and Electro-Optics - Temecula, CA, United States
Duration: Oct 20 2008Oct 23 2008

Other

OtherICALEO 2008 - 27th International Congress on Applications of Lasers and Electro-Optics
CountryUnited States
CityTemecula, CA
Period10/20/0810/23/08

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Joy, J., McLeod, E., & Arnold, C. B. (2008). Optical trap assisted nanoscale laser direct-write patterning. In ICALEO 2008 - 27th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings (pp. 1-6)